EFFECT OF NOZZLE-SUBSTRATE DISTANCE ON ELECTRICAL, STRUCTURAL AND OPTICAL PROPERTIES OF SnO2 THIN FILMS PREPARED BY SPRAY PYROLYSIS

Year 2012, Volume: 5 Issue: 1, 13 - 24, 12.03.2014

Güven Turgut , Demet Tatar , Bahattin Düzgün

Abstract

The physical, electrical and optical properties of SnO2 (TO) thin films deposited using spray pyrolysis technique at different nozzle-to-substrate distances were reported. The solutions consisted of diluted SnCl2.2H2O were sprayed on hot glass substrate which temperature was in 400±5 ˚C. X-ray diffraction (XRD), Uv-vis spectrophotometer and van der Pauw configuration studies had been performed on TO films coated on optical glass substrates. X-ray diffraction pattern revealed the presence of tetragonal crystal structure with (301) preferential orientation for all films. The grain size of the films varied from 23.78 nm to 29.74 nm at different nozzle- substrate distances. The film deposited at 40 cm nozzle-substrate distance had minimum sheet resistance of 3.233 Ω/cm2 and had maximum transmittance at 550 nm of 59.55 %. The best films deposited with optimum nozzle-to-substrate distance (NSD) of 40 cm.

Keywords

SnO2, X-Işını kırınımı, püskürtme metodu, püskürtme burnu-altlık mesafesi

References

• Chacko, S. Philip, N.S. and Vaidyan, V.K. (2007). Effect of substrate temperature on structural, optical and electrical properties of spray pyrolytically grown nanocrystalline SnO2 thin films. Phys. Stat. Sol. (a)., 204, 3305–3315.
• Chacko, S. Philip, N.S. Gophandran, K.G. Koshy, P. and Vaidyan, V.K. (2008). Nanostructural and surface morphological evolution of chemically sprayed SnO2 thin films. Applied Surface Chemistry., 254, 2179.
• Deokate, R.J. Moholkar, A.V. Agawane, G.L. Pawar, S.M. Kim, J.H. and Rajpure, K.Y. (2010), Studies on the effect of nozzle-to-substrate distance on the structural, electrical and optical properties of spray deposited CdIn2O4 thin films. Applied Surface Science., 256, 3522.
• Dua, L. K. De, A. Chakraborty, S. and Biswas, P. K. (2009). Study of spin coated high antimony content Sn–Sb oxide films on silica glass. Materials charecterization. 59, 578.
• Elangovan, E. and Ramamurthi, K. (2003). Studies on optical properties of polycrystalline SnO2:Sb thin films prepared using SnCl2 precursor. Cryst. Res. Technol., 38, 779.
• Elangovan, E. Singh, M. P. Dharmaprakash, M. S. and Ramamurthi, K. (2004). Some Physical Properties of Spray Deposited SnO2 Thin Films. Journal of Optoelectronics and Advanced Materials., 6, 197.
• Elangovan, E. Ramesh, K. and Ramamurthi, K. (2004). Studies on the structural and electrical properties of spray deposited SnO2:Sb thin films as a function of substrate temperature. Solid State Communications., 130, 523.
• Elangovan, E. Shivashankar, S.A. and Ramamurthi, K. (2005). Studies on structural and electrical properties of sprayed SnO2:Sb films Journal of Crystal Growth., 276, 215.
• Elangovan, E. and Ramamurthi, K. (2005). A study on low cost-high conducting fluorine and antimony-doped tin oxide thin filmsApplied Surface Science., 249, 183.
• Haacker, G. (1976). New figure of merit for transparent conductors. J. Appl. Phys., 47, 4086.
• Ilıcan, S. Çağlar Y. and Çağlar, M. ( 2005). Spray Pyrolysis Yöntemi ile Elde Edilen CdZnS Filmlerinin Yapısal Özelliklerine Hazırlama Parametrelerinin Etkisi. C.Ü. Fen-Edebiyat Fakültesi Fen Bilimleri Dergisi., 26(2), 22.
• Jain, G. and Kumar, R. (2004). Electrical and optical properties of tin oxide and antimony doped tin oxide films. Optical Materials., 26, 27.
• Kasar, R.R. Deshpande, N.G. Gudage, Y.G. Vyas, J.C. and Sharma, R. (2008). Studies and correlation among the structural, optical and electrical parameters of spray-deposited tin oxide (SnO2) thin films with different substrate temperatures. Physica B., 403, 3724.
• Kim, H. and Pique, A. (2004). Transparent conducting Sb-doped SnO2 thin films grown by pulsed-laser deposition. Applied Physics letters., 84, 218.
• Kim, K.S., Yoon, S.Y., Lee, W.J. and Kim, K.H. (2001). Aurface morphologies and electrical properties of antimony-doped tin oxide films deposited by plasma-enhanced chemical vapour deposition. Surface and Coating Technology., 138, 229.
• Patil, P. S. (1999). Versatility of chemical spray pyrolysis technique (Review) Materials Chemistry and Physics., 59, 185.
• Ravichandran, K. Muruganantham, G. and Sakthivel, B. (2009). Highly conducting and crystalline doubly doped tin oxide films fabricated using a low-cost and simplified spray technique. Physica B., 404, 4299.
• Serin, T. Serin, N. Karadeniz, S. Sarı, H. Tugluoglu, N. and Pakma, O. (2006). Electrical, structural and optical properties of SnO2 thin films prepared by spray pyrolysis. Journal of Non-Crystalline Solids., 352, 209.
• Thangaraju, B. (2002). Structural and electrical studies on highly conducting spray deposited fluorine and antimony doped SnO2 thin films from SnCl2 precursor. Thin Solid Films., 402, 71.
• Zhang, D. Deng, Z. Zhang, J. and Chen, L. (2006). Microstructure and electrical properties of antimony-doped tin oxide thin film deposited by sol-gel process .Materials Chemistry and Physics., 98, 353.
• Zhang, D. Tao, L. Deng, Z. Zhang, J. and Chen, L. (2006). Surface morphologies and properties of pure and antimony-doped tin oxide films derived by sol-gel dip-coating processing. Materials Chemistry and Physics., 100, 275.
• Zhang, J. and Gao, L. (2004). Synthesis and characterization of antimony- doped tin oxide (ATO) nanoparticles by a new hydrothermal method. Materials Chemistry and Physics., 87, 10. ****