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Microstructural and Tribological Properties of ZrO2 Film Grown by DC Magnetron Sputtering Technique

Year 2024, Volume: 12 Issue: 3, 675 - 683, 30.09.2024
https://doi.org/10.29109/gujsc.1538088

Abstract

To improve the mechanical and tribological properties of biomedical materials, biocompatible coatings are obtained on surfaces using various methods. In this study, ZrO2 thin films were deposited on CP-Ti material used as biomaterial by DC magnetron sputtering method. In this context, structural, mechanical, tribological and wettability properties of ZrO2 film coated on CP-Ti base material were investigated. X-ray diffraction method (XRD), scanning electron microscope (SEM) and energy dispersive X-ray spectroscopy (EDS) were used to characterize the crystallographic structure and surface morphology of the obtained film. Microhardness and wear tests were carried out to investigate the mechanical and tribological properties of the coatings. Additionally, contact angle measurements were made with pure water and ethylene glycol to determine the hydrophobicity and oleophobicity properties of the ZrO2 coated samples. The water contact angle and the oil contact angle of the film are 105.4° and 73.2, respectively. The results showed that ZrO2 coating film deposited on surfaces by DC magnetron sputtering method was more resistant to wear compared to bare CP-Ti.

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References

  • [1] Aslan Çakır, M. (2023). Investigations of the Wettability and Electrochemical Corrosion Behavior of Nb2O5 Thin Films on a Ti45Nb Alloy. Journal of Materials Engineering and Performance, 32(20), 9198-9205.
  • [2] Niinomi, M. (2003). Recent research and development in titanium alloys for biomedical applications and healthcare goods. Science and technology of advanced Materials, 4(5), 445.
  • [3] Aslan Çakır, M. (2023). Investigations of the Wettability and Electrochemical Corrosion Behavior of Nb2O5 Thin Films on a Ti45Nb Alloy. Journal of Materials Engineering and Performance, 32(20), 9198-9205.
  • [4] Yetim, A. F., Kovacı, H., Kasapoğlu, A. E., Bozkurt, Y. B., & Çelik, A. (2021). Influences of Ti, Al and V metal doping on the structural, mechanical and tribological properties of DLC films. Diamond and Related Materials, 120, 108639.
  • [5] Sarraf, M., Rezvani Ghomi, E., Alipour, S., Ramakrishna, S., & Liana Sukiman, N. (2021). A state-of-the-art review of the fabrication and characteristics of titanium and its alloys for biomedical applications. Bio-design and Manufacturing, 1-25.
  • [6] Aslan Çakır, M., Yetim, T., Yetim, A. F., & Çelik, A. (2024). Superamphiphobic TiO2 film by sol–gel dip coating method on commercial pure titanium. Journal of Materials Engineering and Performance, 33(3), 1472-1484.
  • [7] Acar, M. T., Kovacı, H., & Çelik, A. (2022). Investigation of corrosion and tribocorrosion behavior of boron doped and graphene oxide doped TiO2 nanotubes produced on Cp-Ti. Materials Today Communications, 32, 104182.
  • [8] Çomaklı, O., Yetim, T., & Çelik, A. (2014). The effect of calcination temperatures on wear properties of TiO2 coated CP-Ti. Surface and Coatings Technology, 246, 34-39.
  • [9] Kelly, P. J., & Arnell, R. D. (2000). Magnetron sputtering: a review of recent developments and applications. Vacuum, 56(3), 159-172.
  • [10] Bräuer, G., Szyszka, B., Vergöhl, M., & Bandorf, R. (2010). Magnetron sputtering–Milestones of 30 years. Vacuum, 84(12), 1354-1359.
  • [11] Çomakli, O. (2020). Influence of CrN, TiAlN monolayers and TiAlN/CrN multilayer ceramic films on structural, mechanical and tribological behavior of β-type Ti45Nb alloys. Ceramics International, 46(6), 8185-8191.
  • [12] Wojcieszak, D., Mazur, M., Pokora, P., Wrona, A., Bilewska, K., Kijaszek, W., ... & Domaradzki, J. (2021). Properties of metallic and oxide thin films based on Ti and Co prepared by magnetron sputtering from sintered targets with different Co-content. Materials, 14(14), 3797.
  • [13] Rahmati, B., Sarhan, A. A., Zalnezhad, E., Kamiab, Z., Dabbagh, A., Choudhury, D., & Abas, W. A. B. W. (2016). Development of tantalum oxide (Ta-O) thin film coating on biomedical Ti-6Al-4V alloy to enhance mechanical properties and biocompatibility. Ceramics International, 42(1), 466-480.
  • [14] Koski, K., Hölsä, J., & Juliet, P. (1999). Properties of zirconium oxide thin films deposited by pulsed reactive magnetron sputtering. Surface and Coatings Technology, 120, 303-312.
  • [15] Zalnezhad, E. (2016). Effect of structural evolution on mechanical properties of ZrO2 coated Ti–6Al–7Nb-biomedical application. Applied Surface Science, 370, 32-39.
  • [16] Zegtouf, H., Saoula, N., Azibi, M., Bait, L., Madaoui, N., Khelladi, M. R., & Kechouane, M. (2019). A study of properties of ZrO thin films deposited by magnetron sputtering under different plasma parameters: biomedical application. Journal of Electrical Engineering, 70(7), 117-121.
  • [17] Zalnezhad, E. (2016). Effect of structural evolution on mechanical properties of ZrO2 coated Ti–6Al–7Nb-biomedical application. Applied Surface Science, 370, 32-39.
  • [18] Chauhan, K. V., Subhedar, D. G., Prajapati, R., & Dave, D. (2020). Experimental investigation of wettability properties for zirconia based coatings by RF magnetron sputtering. Materials Today: Proceedings, 26, 2447-2451.
  • [19] Patel, U. S., Patel, K. H., Chauhan, K. V., Chawla, A. K., & Rawal, S. K. (2016). Investigation of various properties for zirconium oxide films synthesized by sputtering. Procedia Technology, 23, 336-343.
  • [20] Madhankumar, P. M., & Ilaiyavel, S. (2014). Wear Behavior of Zirconium Oxide (ZrO2) Coating over the Surface of Electro Less Nickel Plating on Tool Steel Substrate. Applied Mechanics and Materials, 440, 88-91.
  • [21] Patel, N. P., Chauhan, K. V., & Prajapati, R. N. (2023). Anti-icing, wettability and structural characterization of Zirconia thin films. Materials Today: Proceedings.
  • [22] Asl, H. G., Sert, Y., Küçükömeroğlu, T., & Bayrak, Ö. (2023). The comparison of wear performances of CP-Ti, Ti6Al4V, Ti45Nb alloys oxidized by anodic oxidation under ambient air and vacuum conditions. Materials Today Communications, 34, 105466.
  • [23] Hishimone, P. N., Nagai, H., & Sato, M. (2020). Methods of fabricating thin films for energy materials and devices. In Lithium-ion Batteries-Thin Film for Energy Materials and Devices. IntechOpen.
  • [24] Jang, Y. S., Amna, T., Hassan, M. S., Gu, J. L., Kim, I. S., Kim, H. C., ... & Khil, M. S. (2014). Improved supercapacitor potential and antibacterial activity of bimetallic CNFs–Sn–ZrO 2 nanofibers: fabrication and characterization. RSC Advances, 4(33), 17268-17273.
  • [25] Kovacı, H., Baran, Ö., Yetim, A. F., Bozkurt, Y. B., Kara, L., & Çelik, A. (2018). The friction and wear performance of DLC coatings deposited on plasma nitrided AISI 4140 steel by magnetron sputtering under air and vacuum conditions. Surface and Coatings Technology, 349, 969-979.
  • [26] Wiltshire, B. D., Mirshahidi, K., Nadaraja, A. V., Shabanian, S., Hajiraissi, R., Zarifi, M. H., & Golovin, K. (2021). Oleophobic textiles with embedded liquid and vapor hazard detection using differential planar microwave resonators. Journal of Hazardous Materials, 409, 124945.

DC Magnetron Sıçratma Yöntemi ile Büyütülen ZrO2 Filminin Mikroyapısal ve Tribolojik Özellikleri

Year 2024, Volume: 12 Issue: 3, 675 - 683, 30.09.2024
https://doi.org/10.29109/gujsc.1538088

Abstract

Project Number

-

References

  • [1] Aslan Çakır, M. (2023). Investigations of the Wettability and Electrochemical Corrosion Behavior of Nb2O5 Thin Films on a Ti45Nb Alloy. Journal of Materials Engineering and Performance, 32(20), 9198-9205.
  • [2] Niinomi, M. (2003). Recent research and development in titanium alloys for biomedical applications and healthcare goods. Science and technology of advanced Materials, 4(5), 445.
  • [3] Aslan Çakır, M. (2023). Investigations of the Wettability and Electrochemical Corrosion Behavior of Nb2O5 Thin Films on a Ti45Nb Alloy. Journal of Materials Engineering and Performance, 32(20), 9198-9205.
  • [4] Yetim, A. F., Kovacı, H., Kasapoğlu, A. E., Bozkurt, Y. B., & Çelik, A. (2021). Influences of Ti, Al and V metal doping on the structural, mechanical and tribological properties of DLC films. Diamond and Related Materials, 120, 108639.
  • [5] Sarraf, M., Rezvani Ghomi, E., Alipour, S., Ramakrishna, S., & Liana Sukiman, N. (2021). A state-of-the-art review of the fabrication and characteristics of titanium and its alloys for biomedical applications. Bio-design and Manufacturing, 1-25.
  • [6] Aslan Çakır, M., Yetim, T., Yetim, A. F., & Çelik, A. (2024). Superamphiphobic TiO2 film by sol–gel dip coating method on commercial pure titanium. Journal of Materials Engineering and Performance, 33(3), 1472-1484.
  • [7] Acar, M. T., Kovacı, H., & Çelik, A. (2022). Investigation of corrosion and tribocorrosion behavior of boron doped and graphene oxide doped TiO2 nanotubes produced on Cp-Ti. Materials Today Communications, 32, 104182.
  • [8] Çomaklı, O., Yetim, T., & Çelik, A. (2014). The effect of calcination temperatures on wear properties of TiO2 coated CP-Ti. Surface and Coatings Technology, 246, 34-39.
  • [9] Kelly, P. J., & Arnell, R. D. (2000). Magnetron sputtering: a review of recent developments and applications. Vacuum, 56(3), 159-172.
  • [10] Bräuer, G., Szyszka, B., Vergöhl, M., & Bandorf, R. (2010). Magnetron sputtering–Milestones of 30 years. Vacuum, 84(12), 1354-1359.
  • [11] Çomakli, O. (2020). Influence of CrN, TiAlN monolayers and TiAlN/CrN multilayer ceramic films on structural, mechanical and tribological behavior of β-type Ti45Nb alloys. Ceramics International, 46(6), 8185-8191.
  • [12] Wojcieszak, D., Mazur, M., Pokora, P., Wrona, A., Bilewska, K., Kijaszek, W., ... & Domaradzki, J. (2021). Properties of metallic and oxide thin films based on Ti and Co prepared by magnetron sputtering from sintered targets with different Co-content. Materials, 14(14), 3797.
  • [13] Rahmati, B., Sarhan, A. A., Zalnezhad, E., Kamiab, Z., Dabbagh, A., Choudhury, D., & Abas, W. A. B. W. (2016). Development of tantalum oxide (Ta-O) thin film coating on biomedical Ti-6Al-4V alloy to enhance mechanical properties and biocompatibility. Ceramics International, 42(1), 466-480.
  • [14] Koski, K., Hölsä, J., & Juliet, P. (1999). Properties of zirconium oxide thin films deposited by pulsed reactive magnetron sputtering. Surface and Coatings Technology, 120, 303-312.
  • [15] Zalnezhad, E. (2016). Effect of structural evolution on mechanical properties of ZrO2 coated Ti–6Al–7Nb-biomedical application. Applied Surface Science, 370, 32-39.
  • [16] Zegtouf, H., Saoula, N., Azibi, M., Bait, L., Madaoui, N., Khelladi, M. R., & Kechouane, M. (2019). A study of properties of ZrO thin films deposited by magnetron sputtering under different plasma parameters: biomedical application. Journal of Electrical Engineering, 70(7), 117-121.
  • [17] Zalnezhad, E. (2016). Effect of structural evolution on mechanical properties of ZrO2 coated Ti–6Al–7Nb-biomedical application. Applied Surface Science, 370, 32-39.
  • [18] Chauhan, K. V., Subhedar, D. G., Prajapati, R., & Dave, D. (2020). Experimental investigation of wettability properties for zirconia based coatings by RF magnetron sputtering. Materials Today: Proceedings, 26, 2447-2451.
  • [19] Patel, U. S., Patel, K. H., Chauhan, K. V., Chawla, A. K., & Rawal, S. K. (2016). Investigation of various properties for zirconium oxide films synthesized by sputtering. Procedia Technology, 23, 336-343.
  • [20] Madhankumar, P. M., & Ilaiyavel, S. (2014). Wear Behavior of Zirconium Oxide (ZrO2) Coating over the Surface of Electro Less Nickel Plating on Tool Steel Substrate. Applied Mechanics and Materials, 440, 88-91.
  • [21] Patel, N. P., Chauhan, K. V., & Prajapati, R. N. (2023). Anti-icing, wettability and structural characterization of Zirconia thin films. Materials Today: Proceedings.
  • [22] Asl, H. G., Sert, Y., Küçükömeroğlu, T., & Bayrak, Ö. (2023). The comparison of wear performances of CP-Ti, Ti6Al4V, Ti45Nb alloys oxidized by anodic oxidation under ambient air and vacuum conditions. Materials Today Communications, 34, 105466.
  • [23] Hishimone, P. N., Nagai, H., & Sato, M. (2020). Methods of fabricating thin films for energy materials and devices. In Lithium-ion Batteries-Thin Film for Energy Materials and Devices. IntechOpen.
  • [24] Jang, Y. S., Amna, T., Hassan, M. S., Gu, J. L., Kim, I. S., Kim, H. C., ... & Khil, M. S. (2014). Improved supercapacitor potential and antibacterial activity of bimetallic CNFs–Sn–ZrO 2 nanofibers: fabrication and characterization. RSC Advances, 4(33), 17268-17273.
  • [25] Kovacı, H., Baran, Ö., Yetim, A. F., Bozkurt, Y. B., Kara, L., & Çelik, A. (2018). The friction and wear performance of DLC coatings deposited on plasma nitrided AISI 4140 steel by magnetron sputtering under air and vacuum conditions. Surface and Coatings Technology, 349, 969-979.
  • [26] Wiltshire, B. D., Mirshahidi, K., Nadaraja, A. V., Shabanian, S., Hajiraissi, R., Zarifi, M. H., & Golovin, K. (2021). Oleophobic textiles with embedded liquid and vapor hazard detection using differential planar microwave resonators. Journal of Hazardous Materials, 409, 124945.
There are 26 citations in total.

Details

Primary Language English
Subjects Material Design and Behaviors, Tribology
Journal Section Tasarım ve Teknoloji
Authors

Mevra Aslan Çakır 0000-0002-3826-8390

Project Number -
Early Pub Date September 26, 2024
Publication Date September 30, 2024
Submission Date August 24, 2024
Acceptance Date September 16, 2024
Published in Issue Year 2024 Volume: 12 Issue: 3

Cite

APA Aslan Çakır, M. (2024). Microstructural and Tribological Properties of ZrO2 Film Grown by DC Magnetron Sputtering Technique. Gazi University Journal of Science Part C: Design and Technology, 12(3), 675-683. https://doi.org/10.29109/gujsc.1538088

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