ATOMİK KATMAN BİRİKTİRME (ALD) CİHAZLARI VE ÇEŞİTLERİNDEKİ GELİŞMELER

Year 2018, Volume: 6 Issue: 4, 590 - 605, 11.12.2018

Alper Uğur , Nuran Ay

https://doi.org/10.21923/jesd.392032

Abstract

Malzemelerin
yüzey özelliklerinin değiştirilmesi ile elde edilen ürünlere kendi
özelliklerinin yanında farklı işlevsellikler kazandırılabilmektedir. Yüzey
teknolojilerindeki gelişmeler yeni ürünlerin eldesini ve üretim süreçlerinin
gelişmesini de sağlamaktadır. ALD yöntemi çok farklı uygulama alanlarında
başarı ile uygulanma potansiyeline sahiptir. Global ALD endüstrisi market
araştırmaları 2017-2025 yılları arasında yıllık %12’lik büyüme öngörmektedir. Bu
makalede ince film biriktirme tekniklerinden biri olan atomik katman biriktirme
(ALD) yönteminde kullanılan cihazların tarihsel gelişimi ve gelişen ALD
çeşitleri incelenmiştir. Çalışma genel ALD çeşitlerinin yanında doğrudan
yazmalı (Direct write) ve rulodan ruloya (Roll to roll) gibi yeni ALD çeşitleri
hakkında bilgi vermektedir. 

Keywords

İnce film kaplama, Atomik katman biriktirme (ALD), Reaktör, Akışkan yatak (AY)

IMPROVEMENTS OF ATOMIC LAYER DEPOSITION (ALD) DEVICES AND TYPES

Abstract

The products obtained by changing the surface
properties of the materials can be given different functionalities besides
their own properties. Developments in surface technologies also provide the
development of obtain new products and manufacturing processes. The ALD method
has the potential to be successfully applied in many different application
areas. The global market research on the atomic layer deposition industry
estimated to annual growth of 12% from 2017 to 2025. In this paper the
historical developments of devices and types used in the application of ALD
method which is a types of thin film coating technique were investigated. It
gives information about new ALD types like direct write and roll to roll ALD as
well as general ALD approaches. 

Keywords

Thin film coating, Atomic layer deposition (ALD), Reactor, Fluidized bed (FB), Powder particles

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