-tical Model for Alloyed Ohmic Contacıs Using a Trililyer Transmission Line Model, " IEEE Trans. Electroıı Devices, vol. ED-42. pp. 1536-1547. August 1995." />
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Transmısyon Ha Ttı Modeli İle Omik Kontak Incelenmesi

Year 1999, Volume: 12 Issue: 2, 92 - 105, 31.12.1999

Hasan Hüseyin Erkaya

Abstract

fiıı yazıda Miıik kımlaklann 0:ellikleriniıı araflınlmasıntla kııll. amlabilecek Iraıısmi. yon

lr., 111 ııım/r/i aı;ıklaıımıyır. Mwhliıı eksik yönleri ele alinarak gerekli diisellmeler sıılııılmııs,

yccr/ıi^i lurlı. ıılıııı-, lır. Ruyıık huyııllıı yanifelh'n Jiisenkr için, Iransmisyuıı haltı yönıenıi

kıılluıııluhilır: cıııcak. kiıçiık hoyııllıı diızcnlmk. kontak direnci diğer etkenler larafmdaıı

.^ılf;r!v, ii-/)i/üvi'};iiK/L-ıı. ilahcı clikktitlı ulmak gerekir.


Keywords

Omik Kuııiaklcır Transnüsyon Hatlı Modeli Yanilelken Dii:en ()/{. ///// lü! 7.

References

  • î""T""and D- widman". "Messung des Ubergangswiderstandes 2wischen Metal] "L Djffusionsschich! in Sı-Planarelementen, " Sotid-Sıale Elachvıı/cs, vol. 12. Do. 879- 886. 1969. -., -.. -.....-"-.. ". "..",. ",.,,,,,,,.<
  • R,M.ur.man" and D-widr"ann, "Current Crowding on Meta! Contacts to Planar Devices." IKEK Traııs. Eleclron Devices, vol. ED-16, pp. 1022-1024, Dec. 1969.
  • H;.Be.rger'-rModels for co"tacts to Pianar Devices, " Solid-Slale Eleclronics. yol. 15. pp. 145-158, 1972. ' ^ ""' . "-.. -.
  • G. ^K. Reeves, "Specific Contact Resistance Using a circular Transmission Line Model." 1-Slalv Elcclroııics, vol. 23, pp. 487-490, 1980" ^" -"'~ "'"""'
  • G.^ K. Reeves^ and ^H. B.Harrison, "Obtaining the Spec.ific Contact Resistance from Line Model Measurements, " 1EEE Electroıı Device Letl.^ vol'EDL^" Pp. lll-lI3. May 1983. -^--. ---....., ^..... ^,,, vu.. cu^,
  • M: He'blu'"', M; '. Nat['a" .l"d C. A. Cha"S, "Characteristics ofAuGeNİ Ohmic Contacts to ı?. As, " Soliıi-Slalf Eleclronics, vol. 25, pp. 185-195, March 1982.
  • , cohen- "COMaü Resistance and Metlıods for Its Determination, " Thiı, Solid Films. vol. 104, pp . 361-379, 1983. ^-...... -.., ...... ^,,.. . , "".,,
  • D. K ^ Schroderand D. L. Meier, "Solar Celi Contact Resistance - A Review, " 1EEE rcıııs. L/ad/vi! Dcvices, voI. ED-3 l, pp. 637-647, May 1984. ^ . --. -. -..,
  • D.. L_Meier and D K-schroder. "C°"tact Resistance: Its Measurement and Relative ^a^, ^^4LOSS' "a SOIarc e"'"I EEET ra"s-E l^^^^t [10] J,',M^P"r'b]ey. ;Duai-LevelJransn.. ission Line Model for Currenl FIow in Metal- ^tp^ Comacts, " /£££ 7/u/u. ffecftT Dcvices, vol. ED-33,^po'. 1795'-İ November 1986. ' -.---. fi--"---. """,
  • 105[II] J. K. Reeves and H. B. Harrison, "An Anal>-tical Model for Alloyed Ohmic Contacıs Using a Trililyer Transmission Line Model, " IEEE Trans. Electroıı Devices, vol. ED-42. pp. 1536-1547. August 1995.
  • [12] D. Sawdai, D. Pavlidis, and D. Cui, "Enhanced Transmission Line Model Stnıctures for Accurate Resistance Evaluation of Small-size Contacts and for More Reiiable Fabrication, " JEEE Traııs. Electro/t Devices, vol. ED-46, pp. 1302-131], July 1999.
  • [13] D. K. Schroder, Semicoııdvctor Materiat aııd Device Characlerizalion, New York: Wilev- Interscience, 1990, pp. 99-}46

Ohmıc Conta Ct Characterıza Tıon Wıth Transmıssıon Lıne Model

Year 1999, Volume: 12 Issue: 2, 92 - 105, 31.12.1999

Hasan Hüseyin Erkaya

Abstract

The iraıısmissioı: line nıodelfor thc ohmic coıılacl characleri:a!ion is desen hed
Siıorlmıniıys çiftin' ınelhod aıv pointed oııl, wıd nmdı/îcations for Ihe measuremenl lechnujiıe
(iıv ıııv. wnlvı. l. 'l'hv linıilalions of Ihe lechnigııe are discııssed. For large geomeıry
mıitivdilılııclcı. '-tievices. llıe Iraıısnıissioıı liııe melhoci may be ıısed in the characterizaüon of the
dhnıic ciHilacls: houvver. çare mıısl be lcıken for small geomelry devices vıhere Ihe contacl
ıv. -ii.'. ttiıiiv is XHKI// cııitt easily o/ıscıııvci hy ths other effecls.

Keywords

Ohmic Cıuılacls Transmissioıı Line Model Senıicondııclor Device ( {n{rücivri:alj()ff.

References

  • î""T""and D- widman". "Messung des Ubergangswiderstandes 2wischen Metal] "L Djffusionsschich! in Sı-Planarelementen, " Sotid-Sıale Elachvıı/cs, vol. 12. Do. 879- 886. 1969. -., -.. -.....-"-.. ". "..",. ",.,,,,,,,.<
  • R,M.ur.man" and D-widr"ann, "Current Crowding on Meta! Contacts to Planar Devices." IKEK Traııs. Eleclron Devices, vol. ED-16, pp. 1022-1024, Dec. 1969.
  • H;.Be.rger'-rModels for co"tacts to Pianar Devices, " Solid-Slale Eleclronics. yol. 15. pp. 145-158, 1972. ' ^ ""' . "-.. -.
  • G. ^K. Reeves, "Specific Contact Resistance Using a circular Transmission Line Model." 1-Slalv Elcclroııics, vol. 23, pp. 487-490, 1980" ^" -"'~ "'"""'
  • G.^ K. Reeves^ and ^H. B.Harrison, "Obtaining the Spec.ific Contact Resistance from Line Model Measurements, " 1EEE Electroıı Device Letl.^ vol'EDL^" Pp. lll-lI3. May 1983. -^--. ---....., ^..... ^,,, vu.. cu^,
  • M: He'blu'"', M; '. Nat['a" .l"d C. A. Cha"S, "Characteristics ofAuGeNİ Ohmic Contacts to ı?. As, " Soliıi-Slalf Eleclronics, vol. 25, pp. 185-195, March 1982.
  • , cohen- "COMaü Resistance and Metlıods for Its Determination, " Thiı, Solid Films. vol. 104, pp . 361-379, 1983. ^-...... -.., ...... ^,,.. . , "".,,
  • D. K ^ Schroderand D. L. Meier, "Solar Celi Contact Resistance - A Review, " 1EEE rcıııs. L/ad/vi! Dcvices, voI. ED-3 l, pp. 637-647, May 1984. ^ . --. -. -..,
  • D.. L_Meier and D K-schroder. "C°"tact Resistance: Its Measurement and Relative ^a^, ^^4LOSS' "a SOIarc e"'"I EEET ra"s-E l^^^^t [10] J,',M^P"r'b]ey. ;Duai-LevelJransn.. ission Line Model for Currenl FIow in Metal- ^tp^ Comacts, " /£££ 7/u/u. ffecftT Dcvices, vol. ED-33,^po'. 1795'-İ November 1986. ' -.---. fi--"---. """,
  • 105[II] J. K. Reeves and H. B. Harrison, "An Anal>-tical Model for Alloyed Ohmic Contacıs Using a Trililyer Transmission Line Model, " IEEE Trans. Electroıı Devices, vol. ED-42. pp. 1536-1547. August 1995.
  • [12] D. Sawdai, D. Pavlidis, and D. Cui, "Enhanced Transmission Line Model Stnıctures for Accurate Resistance Evaluation of Small-size Contacts and for More Reiiable Fabrication, " JEEE Traııs. Electro/t Devices, vol. ED-46, pp. 1302-131], July 1999.
  • [13] D. K. Schroder, Semicoııdvctor Materiat aııd Device Characlerizalion, New York: Wilev- Interscience, 1990, pp. 99-}46
There are 12 citations in total.

Details

Subjects Electrical Engineering
Journal Section Research Articles
Authors

Hasan Hüseyin Erkaya

Publication Date December 31, 1999
Acceptance Date July 4, 1999
Published in Issue Year 1999 Volume: 12 Issue: 2

Cite

APA Erkaya, H. H. (1999). Ohmıc Conta Ct Characterıza Tıon Wıth Transmıssıon Lıne Model. Eskişehir Osmangazi Üniversitesi Mühendislik Ve Mimarlık Fakültesi Dergisi, 12(2), 92-105.
AMA Erkaya HH. Ohmıc Conta Ct Characterıza Tıon Wıth Transmıssıon Lıne Model. ESOGÜ Müh Mim Fak Derg. December 1999;12(2):92-105.
Chicago Erkaya, Hasan Hüseyin. “Ohmıc Conta Ct Characterıza Tıon Wıth Transmıssıon Lıne Model”. Eskişehir Osmangazi Üniversitesi Mühendislik Ve Mimarlık Fakültesi Dergisi 12, no. 2 (December 1999): 92-105.
EndNote Erkaya HH (December 1, 1999) Ohmıc Conta Ct Characterıza Tıon Wıth Transmıssıon Lıne Model. Eskişehir Osmangazi Üniversitesi Mühendislik ve Mimarlık Fakültesi Dergisi 12 2 92–105.
IEEE H. H. Erkaya, “Ohmıc Conta Ct Characterıza Tıon Wıth Transmıssıon Lıne Model”, ESOGÜ Müh Mim Fak Derg, vol. 12, no. 2, pp. 92–105, 1999.
ISNAD Erkaya, Hasan Hüseyin. “Ohmıc Conta Ct Characterıza Tıon Wıth Transmıssıon Lıne Model”. Eskişehir Osmangazi Üniversitesi Mühendislik ve Mimarlık Fakültesi Dergisi 12/2 (December 1999), 92-105.
JAMA Erkaya HH. Ohmıc Conta Ct Characterıza Tıon Wıth Transmıssıon Lıne Model. ESOGÜ Müh Mim Fak Derg. 1999;12:92–105.
MLA Erkaya, Hasan Hüseyin. “Ohmıc Conta Ct Characterıza Tıon Wıth Transmıssıon Lıne Model”. Eskişehir Osmangazi Üniversitesi Mühendislik Ve Mimarlık Fakültesi Dergisi, vol. 12, no. 2, 1999, pp. 92-105.
Vancouver Erkaya HH. Ohmıc Conta Ct Characterıza Tıon Wıth Transmıssıon Lıne Model. ESOGÜ Müh Mim Fak Derg. 1999;12(2):92-105.
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