Modeling and Simulation of DC Glow Discharges in the AlGaSb coupled Ar/H2 Hybrid Micro Plasma System

Year 2024, EARLY VIEW, 1 - 1

Erhan Ongun , Selçuk Utaş , Hilal Kurt , Aybaba Hançerlioğulları

https://doi.org/10.2339/politeknik.1406036

Cited By: 1

Abstract

Several studies have been reported on the theoretical and experimental investigation of gas discharge - semiconductor micro plasma systems (GDSµPS).
In this study, a two-dimensional fluid model of a micro plasma in a square direct-current (DC) glow-discharge chamber is simulated using the finite-element method (FEM) solver COMSOL Multiphysics based on the mixture-averaged diffusion-drift theory of gas discharges and Maxwellian electron energy distribution function.
A unique III-antimonide high-Ohmic semi-insulating aluminum gallium antimonide (AlGaSb) with finely digitated electron emission surface is modeled as planar cathode electrode coupled to ITO/SiO2 planar anode electrode across a gas discharge gap of 100 µm distance. Argon (Ar) and argon mixed with a mole fraction of 5% hydrogen (Ar/H2) gas medium are seperately introduced into the micro gap at sub-atmospheric pressure of 150 Torr, and the cell is driven at 1.0 kV DC by a stationary power source to simulate the transitions from electron field emission state toward self-sustained normal glow discharge state.
The model is simulated to exhibit the transient physical characteristics of the AlGaSb-Ar/H2 glow-discharge micro plasma system by solving the spatio-temporal dynamics of various discharge parameters, including electron density, electron energy density, electron current density and electric potential. It has been observed that a fraction of hydrogen addition to argon can be used as an effective tool in modeling application-specific hybrid micro plasma – semiconductor based infrared photodetector devices.

Keywords

Microplasma, AlGaSb, DC plasma simulation, infrared photodetector.

Ethical Statement

The authors of this article declare that the materials and methods used in this study do not require ethical committee permission and/or legal-special permission

Supporting Institution

Gazi unv.

Project Number

BAP Project Number: FDK-

Thanks

This study has been supported by Gazi University Scientific Research Projects Coordination Unit (BAP Project Number: FDK-2023-8704). The authors would like to thank Gazi University for this support.

Hibrit AlGaSb-Ar/H2 Mikro Plazma Sisteminde DC Glow Deşarjlarının Modellenmesi ve Simülasyonu

Abstract

Bu çalışmada, mikro boşluklu düzlemsel anot/katot elektrot plakalı atmosfer altı basınçta DC -beslemeli gaz deşarj-yarıiletken mikro plazma sistemlerin (GDSµPS) temel karakteristik özellikleri COMSOL Multifizik simülasyon platformunda incelendi. Modelde alüminyum galyum antimonid (AlGaSb) katot elektrot, ITO/SiO2 anot elektrot, 100 µm gaz deşarj aralığına sahip mikro plazma hücresi modellendi. Plazma reaktör ortamında 150 Torr basınç seviyesinde argon (Ar) ve molar 5% kısmi hidrojen karışımlı argon (Ar/H2) tanımlandı. Micro plazma hücresi 1,0 kV DC sabit gerilim altında beslendi. Model, elektron yoğunluğu, elektron enerji yoğunluğu, elektron akım yoğunluğu ve elektrik potansiyeli dahil olmak üzere çeşitli deşarj parametrelerinin uzaysal-zamansal dinamiklerini çözerek AlGaSb-Ar/H2 glow deşarj mikro plazma sisteminin geçiş fiziksel özelliklerini anlamak için simüle edildi. Uygulamaya özel hibrit mikro plazma – yarı iletken tabanlı kızılötesi fotodetektör cihazlarının modellenmesinde argona bir miktar hidrojen ilavesinin etkili bir araç olarak kullanılabileceği gözlemlenmiştir.

Keywords

Mikroplazma, AlGaSb, DC plazma simülasyon, kızılötesi fotodetektör

Project Number

BAP Project Number: FDK-

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