CIGS İnce Film Yüzeyindeki Morfolojik Farklılıkların GLCM Görüntü İşleme Yöntemi ile İncelenmesi

Year 2022, Volume: 17 Issue: 2, 460 - 477, 25.11.2022

Celal Alp Yavru , İsmail Serkan Üncü , Murat Kaleli , Salih Akyürekli

https://doi.org/10.29233/sdufeffd.1125106

Abstract

Çalışmada Mo folyolar ve cam üzerine DC saçtırma yöntemiyle kaplanmış Mo ince filmler üzerine aynı anda termal buharlaştırma metoduyla CIGS yarıiletken malzemesi biriktirilmiştir. İki grup Mo alt katmanların AFM cihazı ile topoğrafyaları ve ortalama yüzey pürüzlülükleri elde edilmiştir. CIGS ince filmlerin kalınlıkları SEM cihazı ile kesit görüntüleri alınarak, 1,122 µm olarak tespit edilmiştir. Numunelerin XRD ölçümleri alınarak yapısal farklılıkları belirlenmiştir. Mo folyo ve ince film alt katmanı üzerine biriktirilen CIGS ince filmlerin yüzeyinden 5000, 10000, 25000 ve 50000 büyütmelerde SEM görüntüleri alınmıştır. Elde edilen SEM görüntülerinin GLCM metodu ile Haralick doku özellikleri incelenmiş, elde edilen sonuçlar değerlendirilerek alt katman Mo topoğrafyasının CIGS ince filmlerin morfolojisi üzerine etkisi araştırılmıştır. Hesaplanan Haralick doku özelliklerinin görece geniş alanlardan daha küçük alanlara doğru değişimleri değerlendirilmiştir. A grubu numunelerden elde edilen görüntülerde enerji değerinin 0,21 ile 0,54 arasında, karşıtlık değerinin 0,15 ile 0,35 arasında, korelasyon değerinin 0,66 ile 0,65 arasında ve homojenite değerinin 0,82 ile 0,92 arasında değiştikleri tespit edilmiştir. B grubunda aynı doku özelliklerinin farklılık gösterdiği görülmüştür. Alttaş farklılığının yapı ve morfoloji üzerine etkisi, SEM görüntülerinin doku özellikleri farklılıkları ile açıklanmıştır.

Keywords

İnce Film, SEM, AFM, GLCM, Haralick Doku Özellikleri

Thanks

Bu makalenin yazarlarından Celal Alp YAVRU’ ya 100/2000 Doktora Programı kapsamında destek veren Yükseköğrenim Kurumu (YÖK)’ na teşekkür ederiz.

Investigation of Morphological Differences on CIGS Thin Film Surface by GLCM Image Processing Method

Abstract

In the study, CIGS semiconductor material was deposited on Mo foils and Mo thin films coated with DC sputtering method on glass by co-evaporation method. The topography and average surface roughness of the two groups of Mo substrates were obtained by the AFM device. The thickness of the CIGS thin films was determined as 1.122 µm from the cross-section SEM image. The structural differences of the samples were determined by taking XRD measurements. SEM images were taken at 5000, 10000, 25000, and 50000 magnifications from the surface of CIGS thin films deposited on Mo foil and thin film substrates. Haralick texture features of the obtained SEM images were examined by GLCM method, the results obtained were evaluated and the effect of substrate Mo topography on the morphology of CIGS thin films was investigated. According to the calculated Haralick features, the changes from large areas to smaller areas were evaluated. In the images obtained from group A samples, it was determined that the energy value in the range of 0.21 and 0.54, the contrast value between 0.15 and 0.35, the correlation value between 0.66 and 0.65 and the homogeneity value between 0.82 and 0.92. It was observed that the same features differed in group B. The effect of substrate difference on structure and morphology is explained by the differences in Haralick texture features of SEM images.

Keywords

Thin Film, SEM, AFM, GLCM, Haralick Texture Features

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