Alev Püskürtme Piroliz Yöntemi Kullanarak IGZO Nanopartiküllerinin Sentezi ve Karakterizasyonu

Yıl 2021, Cilt: 10 Sayı: 4, 1282 - 1289, 31.12.2021

Serdar Yıldırım

https://doi.org/10.17798/bitlisfen.908699

Öz

Yüksek elektron mobilitesi, düşük eşik gerilimi ve kaplama sonrası şeffaf özellik gösteren İndiyum Galyum Çinko Oksit (InGaZnO4, IGZO) malzemesi ekran teknolojilerinde artan bir ivmeyle kullanılmaya başlamıştır. Bu çalışmada, IGZO nanopartikülleri alev püskürtme piroliz yöntemi kullanılarak tek aşamada başarıyla sentezlendi. Üretilen nanopartiküllerin faz ve element analizleri, sırasıyla X-ışını kırınımı (XRD) ve X-ışını fotoelektron spektroskopisi (XPS) ölçümleriyle yapıldı. Isıl işlem öncesi XRD analizinde amorf yapı gözlemlenirken, 1200 oC de yapılan kalsinasyon sonucu rombohedral kristalin InGaZnO4 yapısı tespit edilmiştir. Ayrıca, elementel analiz sonucunda yapı içerisinde In, Ga, Zn ve O elementlerinin varlığı kanıtlanmıştır. Yüzey morfolojisi ve partikül büyüklüğü taramalı elektron mikroskobu (SEM) kullanılarak tespit edilirken, nanopartiküllerin parçacık boyutlarının <100 nm den küçük ve yarı küresel olduğu bulunmuştur. UV uyarma altında nanopartiküllerin fotolüminesans ve optik bozulma zamanı karakterizasyonları incelenmiş ve 380 nm uyarma altında IGZO nanopartikülleri, 510 nm ve 570 nm civarında emisyon sergilemiştir. Bu uyarma ve emisyon altında yapılan optik bozulma süresi iki üstelli ve 32,36 µs olarak hesaplanmıştır.

Anahtar Kelimeler

IGZO, Alev Püskürtme, Nanopartikül, Fotolüminesans

Teşekkür

Bu çalışmanın yapıldığı ve cihazlarının kullanıldığı Elektronik Malzemeler Üretimi ve Uygulama Merkezi (EMUM)’ ne vermiş olduğu desteklerden dolayı teşekkür ederim.

Synthesis and Characterization of IGZO Nanoparticles Using Flame Spray Pyrolysis Method

Öz

Indium Gallium Zinc Oxide (InGaZnO4, IGZO) material, which shows high electron mobility, low threshold voltage and transparent after coating, has been used with increasing acceleration in screen technologies. In this study, IGZO nanoparticles were successfully synthesized at one step using the flame spray pyrolysis method. Phase and elemental analysis of the produced nanoparticles were carried out by X-Ray Diffraction (XRD) and X-Ray Photoelectron Spectroscopy (XPS) measurements, respectively. While the amorphous structure was observed in the XRD analysis before the heat treatment, the InGaZnO4 structure of the rhombohedral crystal was determined as a result of calcination at 1200 oC. In addition, as a result of elemental analysis, the existence of In, Ga, Zn and O elements in the structure has been proved. Surface morphology and particle size were determined using scanning electron microscopy (SEM), while the particle sizes of nanoparticles were found to be less than <100 nm and hemispherical. Photoluminescence and optical decay time characterizations of nanoparticles under UV excitation were studied and IGZO nanoparticles exhibited emission around 510 nm and 570 nm at 380 nm excitation. The optical decay time under this excitation and emission was calculated as bi-exponentials and 32.36 µs.

Anahtar Kelimeler

IGZO, Flame Spray, Nanoparticle, Photoluminescence

Kaynakça

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