Ultrasonik Sprey Piroliz ile Üretilen Flor Katkılı Kalay Oksit İnce Filmlerin Yapısal, Morfolojik, Optiksel ve Elektriksel Analizleri

Yıl 2019, Cilt: 7 Sayı: 3, 2107 - 2115, 31.07.2019

Murat Kaleli , Durmuş Ali Aldemir , Ahmet Buğrahan Bayram , Celal Alp Yavru

https://doi.org/10.29130/dubited.549547

Cited By: 2

Öz

Bu çalışmada yüksek şeffaflığa
sahip Flor katkılı Kalay Oksit ince filmleri ultrasonik sprey piroliz tekniği
ile başarılı bir şekilde üretilmiştir. İnce filmlerin yapısal ve morfolojik
karakterizasyonu için X-ışını kırınımı, taramalı elektron mikroskobu ve atomik
kuvvet mikroskobu analizleri yapılmıştır. X-ışını kırınımı desenleri göstermiştir
ki filmler polikristal haldedir ve (200) tercihli yönelimi boyunca
büyümüşlerdir. 3,16 eV’luk bir band aralığı UV-Vis ölçümlerinden elde
edilmiştir. İnce filmlerin öz direnci 1,35×10-3W-cm
olarak bulunmuştur.

Anahtar Kelimeler

Flor katkılı Kalay Oksit, Ultrasonik sprey piroliz, Fiziksel özellikler

Structural, Morphological, Optical and Electrical Analysis of Fluorine Doped Tin Oxide Thin Films Fabricated by Ultrasonic Spray Pyrolysis

Öz

In this study, Fluorine doped Tin Oxide (FTO) thin films with high
transparency were fabricated by ultrasonic spray pyrolysis technique, successfully.
The analyses of X-ray diffraction, scanning electron microscopy and atomic
force microscopy were used for the structural and morphological
characterization of the thin films. X-ray diffraction patterns showed that the
films were polycrystalline and grow along to preferred orientation of (200).
The band gap value of 3.16 eV was obtained from UV-Vis measurements. The
resistivity of the thin films was found to be as 1.35×10-3W-cm.

Anahtar Kelimeler

Fluorine doped Tin Oxide, Ultrasonic Spray Pyrolysis, Physical properties

Kaynakça

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