USP Tekniği ile Çeşitli Öncülerin ZnO İnce Filmler Üzerindeki Etkisi

Yıl 2021, Cilt: 14 Sayı: 3, 926 - 935, 18.12.2021

Hilal Kübra Sağlam , Sevda Sarıtaş , Mehmet Ertugrul

https://doi.org/10.18185/erzifbed.1009191

Öz

ZnO düşük maliyetinden ve sahip olduğu avantajlı özelliklerinden dolayı ince film kaplamada kullanılan başlıca malzemelerdendir. Bu çalışmanın amacı, ultrasonik sprey piroliz (USP) tekniği ile kaplanmış çinko oksit ince filmlerin optik, morfolojik ve yapısal özelliklerini incelemektir. ZnO ince filmler, çinko asetat ve çinko nitrat gibi farklı öncü çözeltiler kullanılarak 450°C'de büyütülmüştür. Bu işlemlerde cam altlık kullanılmıştır. 0.1M ve 100 mL çözeltiler hazırlanmıştır. XRD desenlerine göre büyüme yönelimleri (002) şeklindedir. Çinko asetat ve çinko nitrat için bandgap değerleri sırasıyla, 3.25 eV ve 3.13 eV olarak ölçülmüştür. Ayrıca Debye-Scherrer hesaplamalarından anlaşıldığı üzere öncü tuz olarak seçilen çinko asetat ile elde edilen filmlerin ZnO tane boyutu öncü tuz olarak seçilen çinko nitrat ile elde edilen filmle hemen hemen aynıdır. Son olarak ZnO filmlerdeki oksijen miktarı farklı çözeltilere ve çinko tuzlarına bağlı olarak farklılık gösterir.

Anahtar Kelimeler

Gaz Sensörü, İnce Film, ZnO İnce Film, Ultrasonik Sprey Piroliz(USP)., Gaz Sensörü, İnce Film, ZnO İnce Film, Ultrasonik Sprey Piroliz(USP).

Effect of Various Precursors on ZnO Thin Films by USP Technique

Öz

ZnO is one of the main materials used in thin film coating due to its low cost and advantageous properties. The aim of this study is to examine the optical, morphological and structural properties of zinc oxide thin films coated with ultrasonic spray pyrolysis(USP) technique. ZnO thin films were grown at 450°C using different precursor solutions such as zinc acetate and zinc nitrate. Glass substrate was used in these processes. 0.1M and 100 ml solutions were prepared. Growth orientations according to XRD patterns are (002). Bandgap values for zinc acetate and zinc nitrate were measured as 3.25 eV and 3.13 eV, respectively. In addition, as can be seen from the SEM images, the ZnO grain size of the films obtained with the zinc acetate salt is smaller than that of the zinc nitrate. Finally, the amount of oxygen in ZnO films varies depending on different solutions and zinc salts.

Anahtar Kelimeler

Gas Sensor, Thin Film, ZnO Thin Film, Ultrasonic Spray Pyrolysis(USP

Kaynakça

• 1. Vyas, S. 2020. “A Short Review on Properties and Applications of Zinc Oxide Based Thin Films and Devices”, Johnson Matthey Technol. Rev., 64, (2), 202–218.
• 2. Engle, R.W. 2012. “Advantages of TCO via Ultrasonic Spray Under Atmospheric Conditions”, 16th International Coating Science and Technology Symposium(ISCST), Atlanta, GA, USA.
• 3. Arnou, P., Bowers, J.W., Walls, J.M. 2014. “Aluminium-Doped Zinc Oxide Deposited by Ultrasonic Spray Pyrolysis for Thin Film Solar Cell Applications”, IEEE 40th Photovoltaic Specialist Conference (PVSC).
• 4. Benzarouk, H., Mekhnache, M., Drici, A., Amara, A. 2019. “Effect of The Precursor Solution on The Structural Morphological and Optical Properties of Zno Thin Films Deposited by Spray Pyrolysis Technique for Solar Cell Application”, International Journal Of Scientific Research & Engineering Technology (IJSET) , Vol 10 pp 45-49.
• 5. Kasapoğlu, A.E., Habashyani, S., Baltakesmez, A., İskenderoğlu, D., Gür, E. 2021. “The Effect of The Change in The Amount of Sb Doping in ZnO Nanorods For Hydrogen Gas Sensors”, International Journal of Hydrogen Energy, Volume 46, Issue 41, Pages 21715-21725.
• 6. Tumbul, A. 2019. “Effect of Monoethanolamine Content on the Crystallinity of ZnO Thin Film”, Süleyman Demirel Üniversitesi Fen Edebiyat Fakültesi Fen Dergisi, 14: 155-164.
• 7. Atay, F., Akyuz, I., Durmaz, D., Köse, S.. 2019. “Characterization of ZnO-SnO2 Oxide Systems Produced by Ultrasonic Spray Pyrolysis”, Solar Energy, Volume 193, Pages 666-675.
• 8. Ramadhani, M.F., Pasaribu, M.A.H., Yuliarto, B., Nugraha. 2014. “Fabrication of ZnO Nanorod Using Spray-Pyrolysis and Chemical Bath Deposition Method”, 5th Nanoscience and Nanotechnology Symposium (NNS2013) AIP Conf. Proc. 1586, 74-77 .
• 9. Yuki, T., Ueno, S., Hagiwara, M., Fujihara, S. 2015. “Fabrication of Layered Hydroxide Zinc Nitrate Films and Their Conversion to Zno Nanosheet Assemblies for Use in Dye-Sensitized Solar Cells”, Journal of Asian Ceramic Societies 3 144–150.
• 10. Agrawal, S., Rane, R., Mukherjee, S. 2013. “ZnO Thin Film Deposition for TCO Application in Solar Cell”, Hindawi Publishing Corporation Conference Papers in Energy Volume 2013, Article ID 718692, 7 pages.
• 11. Ynineb, F., Hafdallah, A., Alda, M.S., Attaf, N. 2013. “Influence of Sn Content on Properties of ZnO:SnO2 Thin Films Deposited by Ultrasonic Spray Pyrolysis”, Materials Science in Semiconductor Processing, Volume 16, Issue 6, Pages 2021-2027.
• 12. Supriyono, Surahman, H., Krisnandi, Y.K., Gunlazuardi. J. 2015. “Preparation and Characterization of Transparent Conductive Sno2-F Thin Film Deposited by Spray Pyrolysis: Relationship Between Loading Level and Some Physical Properties”, Procedia Environmental Sciences, 28 242 – 251.
• 13. Malik, O., De la Hidalga-Wade, F.J., Amador, R.R. 2015. “Fluorine-doped Tin Oxide Films with A High Figure of Merit Fabricated by Spray Pyrolysis”, Journal of Materials Research, vol. 30, no. 13, pp. 2040–2045.
• 14. Bilgin V., Akyuz I., Ketenci E., Kose S., Atay F. 2010. “Electrical, Structural and Surface Properties of Fluorine Doped Tin Oxide Films”, Applied Surface Science, vol. 256, no. 22, pp. 6586–6591.
• 15. Lalasari, L.H., Arini, T., Andriyah, L., Firdiyono, F., Yuwono, A.H. 2018. “Electrical, Optical and Structural Properties of FTO Thin Films Fabricated by Spray Ultrasonic Nebulizer Technique from SnCl4 Precursor”, AIP Conference Proceedings, p. 020001, Proceedings of the International Seminar on Metallurgy and Materials (ISMM2017).
• 16. Kaleli, M., Aldemir, D.A., Bayram, A.B., Yavru, C.A. 2019. “Ultrasonik Sprey Pirolizile Üretilen Flor Katkılı Kalay Oksit İnce Filmlerin Yapısal, Morfolojik, Optiksel ve Elektriksel Analizleri”, Düzce Üniversitesi Bilim ve Teknoloji Dergisi, 7 2107-2115.
• 17. Skompska, M., Zarebska, K. 2014. “Electrodeposition of ZnO Nanorod Arrays on Transparent Conducting Substrates–a Review”, Electrochimica Acta, Volume 127, Pages 467-488.