Investigation of the effect of oxygen flow modulation on ITO film properties to improve the performance of SHJ solar cells

Yıl 2024, Cilt: 13 Sayı: 3, 1027 - 1033, 15.07.2024

Emre Kartal , Furkan Güçlüer , Elif Damgacı , Ali Ogün Sarp , Ayşe Seyhan , Yüksel Kaplan

https://doi.org/10.28948/ngumuh.1461409

Öz

Photovoltaic technology offers a sustainable solution for the growing energy needs of the world, while reducing environmental impact. Transparent Conductive Oxides (TCOs), which are essential in photovoltaic technology, offer high light transmittance and effective charge carrier extraction. This research focuses on the impact of oxygen (O2) flow rates in the deposition of indium tin oxide (ITO) films on n-type crystalline silicon (c-Si) substrates by DC magnetron sputtering. The structural, optical, and electrical properties were analyzed. Based on the results, the optimal O2 ratio was determined and used in the fabrication of SHJ solar cells, achieving an efficiency of 18.6%.

Anahtar Kelimeler

Silicon heterojunction (SHJ) solar cell, DC magnetron sputtering, Transparent conductive oxides (TCOs), indium tin oxide (ITO).

Proje Numarası

20AG002 ve 20AG014

SHJ güneş hücrelerinin performansını artırmak için oksijen akış modülasyonunun ITO film özellikleri üzerine etkisinin araştırılması

Öz

Fotovoltaik teknolojisi, dünyanın artan enerji ihtiyaçlarına sürdürülebilir bir çözüm sunarken çevresel etkiyi de azaltmaktadır. Fotovoltaik teknolojide önemli olan şeffaf iletken oksitler (TCO'lar), yüksek ışık geçirgenliği ve etkili yük taşıyıcı ekstraksiyonu sunar. Bu araştırma, DC magnetron püskürtme ile n-tipi kristal silisyum (c-Si) alt tabakalar üzerine indiyum kalay oksit (ITO) filmlerin biriktirilmesinde oksijen (O2) akış hızlarının etkisine odaklanmaktadır. Yapısal, optik ve elektriksel özellikler analiz edilmiştir. Elde edilen sonuçlara dayanarak, optimum O2 oranı belirlenmiş ve SHJ güneş pillerinin üretiminde kullanılarak %18,6'lık bir verimlilik elde edilmiştir.

Anahtar Kelimeler

Silisyum heteroeklem (SHJ) güneş hücresi, DC magnetron püskürtme, Şeffaf iletken oksitler (TCO, indiyum kalay oksit (ITO).

Destekleyen Kurum

TÜBITAK

Proje Numarası

20AG002 ve 20AG014

Teşekkür

This work is supported by the Scientific and Technological Research Council of Turkey (TÜBITAK) under grant numbers 20AG002 and 20AG014.

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